A method and an apparatus for measuring positions of contact elements of an electronic component

专利摘要:
An apparatus and method for measuring the position of each of a set of N contact elements of an electronic component have been disclosed. The first and second light paths are generated by first and second light beams having different viewing angles. Both the first and second light paths can be selectively opened and terminated into the image plane by a single camera. The positions are determined using the first and second images calculated by the first and second light beams, respectively.
公开号:KR20040029316A
申请号:KR10-2003-7008892
申请日:2002-01-02
公开日:2004-04-06
发明作者:스메츠카알；반질스카렐；자보리츠키존；에버라에르츠유르겐
申请人:이코스비젼 시스팀스 엔.브이.；
IPC主号:

专利说明:

FIELD OF THE INVENTION METHOD AND AN APPARATUS FOR MEASURING POSITIONS OF CONTACT ELEMENTS OF AN ELECTRONIC COMPONENT}
[2] Such methods and apparatus are known from PCT / BE00 / 00020. In the known method and apparatus the first image is recorded by the first camera and the second image is recorded by the second camera. The position of the contact element is determined based on the data in the first and second images.
[3] A drawback of the known methods and apparatus is that two separate cameras are required. The first camera records the first image and the second camera records the second image. As a result, two frame gabor channels are required to process the image data. Moreover, a large volume is required because two cameras must be housed in the same device.
[1] The present invention relates to a method and apparatus for measuring the position of said N contact elements, respectively, such that first and second images of a set of N contact elements of an electronic component are recorded. The first image is obtained by light reflected perpendicularly to the contact element, and by light reflected at triangular angles to the contact element.
[17] 1 shows a schematic overview of a first preferred embodiment of a device according to the invention.
[18] FIG. 2 shows first and second optical paths formed in the device shown in FIG.
[19] 3 shows an example of formed first and second images recorded by the apparatus shown in FIG. 1;
[20] 4 shows an example of first and second images recorded by the apparatus shown in FIG. 1 and recorded using a distortion-free optical system.
[21] 5 shows a schematic overview of a second preferred embodiment of the device according to the invention.
[22] 6 illustrates the viewing-depth required when using the method of the present invention.
[23] 7 shows schematically the principle of a third preferred embodiment of the device according to the invention.
[24] 8 shows a different image setup obtained by the apparatus shown in FIG. 5.
[25] 9 shows an example of an image recorded by the apparatus shown in FIG. 8;
[4] It is an object of the present invention to realize a method and apparatus for measuring each position of a contact element of an electronic component without requiring only one camera without affecting the measurement accuracy.
[5] The method according to the invention,
[6] Bringing the set of contact elements into a measurement plane;
[7] Illuminating said measuring plane with a first light source which is substantially homogeneous;
[8] Forming a first light path in a first viewing angle direction generated by a first light beam calculated by the first light source and reflecting on at least one of the contact elements, wherein the first light path is the at least one; Starting at one contact element and ending at the image plane of the camera;
[9] Forming a second light path generated by a second light beam obtained by reflection at the at least one contact element in a second viewing angle direction having a value different from the first viewing angle, wherein The second optical path starting at the at least one contact element and ending at the image plane of the camera;
[10] Selectively opening the first light path and forming a first image of the contact element by the camera, selectively opening the second light path and forming a second image of the contact element by the camera step; And
[11] Measuring the position using the first image and the second image.
[12] By creating first and second light paths where the first and second light paths terminate in the image plane of the same camera, two different images can be formed of the same contact element using one camera. Selective opening of the first and second light paths results in light traveling along the first path being blocked when the second light path is opened and vice versa. In this way, the second image obtained by the second light path is not affected by the light traveling along the first light condensation. Thus, two different images are obtained that enable one camera to determine the position of the contact element.
[13] A first preferred embodiment of the device according to the invention comprises a second light source provided for calculating the second light beam, the second light beam having the output of the second light beam at an angle α at the measurement plane Is directed to enter, where 20 ° ≦ α ≦ 80 °. The use of a second light source allows for a clear distinction between the lights in different light paths.
[14] A second preferred embodiment of the device according to the invention is characterized in that said first and second light sources are provided for producing light in a non-overlapping wavelength range. The use of non-overlapping wavelength ranges makes it possible to more clearly distinguish light traveling along the light paths as light of different wavelength ranges travels along the first and second light paths.
[15] Preferably the selection means provided for selectively opening said first or second light path is formed by a dichroic mirror. Coupled with light in different wavelength ranges, dichroic mirrors provide a dip that is reflective for one wavelength range but transmissive for other wavelength ranges.
[16] A third preferred embodiment of the device according to the invention is characterized in that at least one lateral mirror is set up at a viewing angle ψ adjacent the measuring plane, wherein the camera has a resolution of nK x mK, where 1 ≦ n ≦ 2 and 1 ≦ m ≦ 2, provided for recording the light reflected by the at least one mirror. This embodiment requires the mirror to be set up less critically to establish the first and second optical paths.
[26] The invention is now described in more detail with reference to the drawings.
[27] The method according to the invention is designed to automatically calculate the coplanar view of contact elements of electronic components such as Ball Grid Array (BGA) / Chip Scale Packaging (CSP) and flip-chip devices. Other calculations made by the present invention include calculations for detecting elements of two or three dimensional size, the color and shape of these elements, and elements that are missing or placed in the wrong position.
[28] In a first embodiment of the device 8 according to the invention shown in FIG. 1, the electronic component 10 is connected to the measuring plane 7 such that its N contact elements are illuminated by the first light source 3. Is placed. The latter yields homogeneous illumination for the contact element at low incidence angles of at most 20 °. Preferably the first light source comprises a high quality ring-light illumination source. Such a light source consists of a series of LED's arranged in a ring, square, hexagon or other nearly planar geometrical arrangement located below the plane in which the contact element is placed. It is very important that the nearly homogeneous light field covers the volume where the contact element of the electronic component is located. In this way, nearly homogeneous illumination for different contact elements is obtained. To obtain symmetrical illumination, the amount of angularity is determined by the dimensions of the component to be measured. The larger the component, the larger the angle. Thus, for example, for a component of 40 x 40 mm, the diameter of the ring is 15 cm and the angle of incidence = 15 °, for components smaller than 15 x 15 mm,
[29] Incident angle = 10 degrees.
[30] Since the light source 3 illuminates the surface on which the contact element is located from the periphery of this surface, the side of the contact element formed of balls is generally illuminated. The light produced by the light source 3 is reflected at a first viewing angle that is substantially perpendicular to the measurement plane 7 in which the electronic component 10 is located. This reflected light is incident on the first mirror 1, which is inclined at an angle δ defined as a function of the other photometers forming the device 8.
[31] For example, a second illumination source 4 formed of a series of LED's is mounted below the measurement plane 7. The light produced by the second illumination source is incident on the measurement plane at an angle. The second mirror 5 inclined at an angle δ captures light that is calculated by the second illumination source 4 and reflects on the surface of the contact element 10. The light reflected by the second mirror 5 is angled It faces toward the 3rd mirror 6 inclined to.
[32] The dichroic mirror 2 inclined at an angle θ is an object of a single camera 9 placed under the first mirror 1 and the dichroic mirror 2 to reflect light reflected by the first mirror 1. Reflect on The dichroic mirror is transparent to the light reflected by the third mirror 6 in such a way that the light of the dichroic mirror reaches the single camera 9. This camera is preferably a CCD or CMOS camera.
[33] The setup of the illumination source and the mirror, as shown in FIG. 1, makes it possible to form first and second light paths as shown in FIG. 2. The first light path P1 is generated by the first light beam, which is generated by the first illumination source 3 and which light is almost in relation to the measurement plane with the electronic component 10 set up. Reflect in the vertical direction. The first optical path P1 has an initial or first section extending between the measuring plane and the first mirror 1. The second section extends between the first mirror 1 and the dichroic mirror 2. The final section of the first light path extends between the image plane of the camera 9 and the dichroic mirror 2. The final section is obtained by the light reflected towards the camera and incident on the dichroic mirror. In this example, the angle κ between the light incident and reflected on the dichroic mirror is κ = 31 °.
[34] The second light path P2 is produced by the second light beam calculated by the second illumination source 3 incident on the measurement plane at an angle of α of 20 ° ≦ α ≦ 80 °. The initial or first section of the second light path P2 extends in the direction of the second viewing angle α between the measuring plane and the second mirror 5. The angle δ at which the second mirror is inclined is determined by the position and angle α of the camera. In this example, 2 ° ≤δ≤15 °. The second section of the second light path is obtained by the light reflected by the second mirror 5 and directed towards the third mirror 6. The direction of the third mirror 6 depends on one of the second camera 5 and the camera 9. 5 ° ≤ in this example ≤35 °. The final section of the second light path extends between the image plane of the camera 9 and the third mirror. The final section is obtained by the light passing through the dichroic mirror and reflected by the third mirror.
[35] The dichroic mirror enables multiplexing of the image obtained by the light traveling on the one hand along the first path and on the other hand along the second path. Dichroic mirrors have the property of acting as a mirror by reflecting light over a first wavelength range while the mirror has a property of transmission, ie, as a simple glass plate, for a second non-overlapping wavelength range. The dichroic mirror is thus a wavelength-multiplexer. By assigning a first wavelength range to light traveling along the first path and assigning a second wavelength range that does not overlap the first wavelength range to light traveling along the second path, a single to form two different images An optical system having a characteristic of using a camera is obtained.
[36] One possible way of assigning a wavelength range is for example to assign red light in the range of 600 nm to 720 nm for the first light source and blue light in the range of 420 nm to 550 nm for the first light source. The red light then travels along the first light path P1 and the dichroic mirror 4 serves as a mirror for the red light, ie reflects the red light towards the camera. Meanwhile, blue light travels along the second optical path. Since the dichroic mirror 2 is transparent to blue light, the blue light passes through the dichroic mirror to reach the camera 9.
[37] Preferably, the first and second light sources are not switched together but alternately switched. Due to the scattering, although the blue light reaches the first mirror 1 and the red light reaches the third mirror 6, this scattered light affects the formation of the first and second images of the camera. Does not have Blue light entering the first mirror and reflecting toward the dichroic mirror passes through the dichroic mirror because the dichroic mirror transmits blue light. The red light reaching the third mirror and incident on the dichroic mirror is reflected by the dichroic mirror in the above manner. Thus the two images are clearly separated.
[38] 3 shows a first image acquired by light traveling along a first path on the left side and a second image acquired by light traveling along a second path on the right side. The first image is obtained by vertical reflection on the contact element and is typically donut shaped. The first image exhibits a moon shape formed by lateral illumination at triangular angles.
[39] Since the optical axis of the initial section in the second optical path is not perpendicular to the measurement plane but forms an angle α with the measurement plane, the various points on the electronic component are at varying distances from the object used. As a result, very large viewing-depth is required. 6 illustrates the viewing-depth. The required viewing-depth d is expressed as follows. d = f.sinα, where f represents a field-of-view corresponding to the lateral size of the electronic component or object under consideration. The required depth-of-view is obtained using the very small aperture of the camera objective. As an example, a full viewing-depth of field-of-view f = 50 mm and viewing angle α = 60 °, 43 mm is required. The overall viewing-depth is the lightwave formula, depth = λ / (aperture) ² , where λ is the wavelength of the light source used. Assuming wavelength = 500 nm, the required aperture on the object side is 0.0034, which corresponds to an F-number of 16 for an f = 50 mm focal length objective.
[40] Another constraint that must be met with the use of a single camera is that the average optical length for two views (measured along the central axis of the light path), i.e. the distance between the camera's image plane and the object, is sharp with only one objective lens. In order to be able to generate it should be substantially the same. This condition is met by the proper setup of the different mirrors 1, 2, 5 and 6 and their exact tilt in such a way that the first and second optical paths follow the same optical length.
[41] Several modifications and improvements can be applied to the device shown in FIG. 1. Within a given setup, i.e. for fixed optical-mechanical assembly of mirrors and cameras, one can change the field-of-view and thus change the camera resolution by simply swapping out a single objective. Objective lenses of different focal lengths completely fill the camera field with properly adjusted apertures and mounting positions, but are sharper to map smaller (large focal length) or larger (small focal length) field-of-views. Create an image.
[42] Due to the angular viewing of the second image below the angle α, the image height is compressed by cos (α) as shown in FIG. 3. In other words, the object square of side E appears to be trapezoidal, approximately E in width and E * cos (α) in height. Therefore, the resolution where the entire area of the image field is not used and thus the low degree of the method can be improved by expanding the height of the image without affecting the width. That is, an optical system having different extensions for two orthogonal directions is called anamorphotic optical system. This can occur in the second viewing path by employing two cylindrical mirrors for the second and third mirrors 5 and 6, replacing the two planar mirrors. The result is shown in FIG. Alternatively, two additional cylindrical lenses can be used in the second viewing path. These two mirrors and two lenses form a beam expander in one direction and have no optical action in the other direction. None of these elements can be part of the first path and part of the straight viewing path because the aspect ratio of the object must remain unaffected.
[43] It will be apparent that the setup as illustrated in FIGS. 1 and 2 only shows a simplified embodiment of the device according to the invention. Alternative embodiments may be used to realize the first and second optical paths. Thus, for example, it is not necessary to have an initial section in which the first light path is perpendicular to the measurement plane, ie the first viewing angle extends by 90 °. Other values for the first and second viewing angles can also be appreciated. Of course the setup of the different mirrors has to be adapted to the selection of the position of the single camera and the first and second viewing angles.
[44] It is also not required that the first and second light paths have different sections. For example, different alignments of the camera 9 and / or component 10 and / or the first light source 3 are directed toward the image plane of the camera, without using the first mirror 1, It allows the configuration to proceed directly. Also, more or fewer mirrors than mirrors 1, 5 and 6 can be used to establish the optical path. What is important is that two light beams can be generated to form first and second light paths leaving the measurement plane, respectively, along the first and second viewing angles having different values. Each of these light beams must produce an image on the image plane of a single camera at every hour.
[45] Instead of using the dichroic mirror 2, a semi-permeable mirror can be used. In the latter embodiment, a filter or shutter must be provided in the first and second light paths. These filters and shutters must block one optical path if one of them is open or vice versa. Thus, for example, if the first light path is open, the shutter must close the second path. It should be noted that sufficient light intensity is calculated by the light sources 4 and 4 since some light intensity is lost by the use of the semi-transmissive mirror.
[46] If filters 13 and 14 are used as in the embodiment shown in Fig. 5, these filters must be transmissive to the wavelength range assigned to the optical path in which these filters are mounted to filter the wavelength. In this way, the light from one light path does not interfere with the light of the other path and does not interfere with each image to be taken.
[47] In this way it is important that the optical path is selectively opened by the use of dichroic mirrors or by the use of filters or shutters. When using a shutter, their opening must be synchronized with the light source. Thus, when the first light source 3 emits light, the shutter 13 must be open while the second light source is preferably switched off and the shutter 14 must be closed. When the second light source 4 emits light, the opposite situation occurs, that is, the shutter 13 is closed and the shutter 14 is opened. The shutters are for example formed by a conventional diaphragm or LCD which can be electrically operated.
[48] When using a translucent mirror, the wavelengths of light emitted by the two light sources can be the same. Of course, when dichroic mirrors are used, the wavelength ranges of the two light sources are required to be different and not overlap. The first and second images must be created sequentially so as not to interfere with each other.
[49] Another embodiment of a single-camera solution is shown in FIG. 7 and does not use wavelength multiplex but uses spatial synthesis. In this embodiment at least one lateral mirror 20 is located adjacent to the object 10. This mirror forms an angle ψ with respect to the measurement plane. This angle is between 20 ° and 80 °. In the embodiment shown, two mirrors 20 and 21 are located, one to the east and the other to the west. Alternatively, it is also possible to place two mirrors additionally one north and one south. In the latter embodiment, the direct view, which forms the first image, is formed in the center of the image plane, as shown in FIG. 8, and four additional bows around the direct view form the second image. .
[50] In the embodiment shown in FIG. 7, a single camera and lens view the direct view and the direct view and the side view adjacent to each other. Figure 7 shows imposition obtained with a setup with a single mirror on each side. In order to obtain the same resolution as in the embodiment of Fig. 1 or 5, the camera is required to have more pixels in one direction. For example, with a viewing angle ψ = 60 °, the image size is compressed with a factor of 2 (cosψ = 1/2). As a result, the camera is required to have 1.5 times the number of pixels in the other embodiments. Nevertheless, the use of mirrors adjacent to the measurement plane prevents the use of mirrors and the alignment of these mirrors in the optical path. For example, if a 1K x 1K pixel camera is used in the embodiment of Figures 1 or 5, the 1K x 1.5K pixel camera is preferred for setup with one side mirror to achieve the same resolution. The field-depth requirement is the same as described above.
[51] The more side mirrors are used, the more accurate the measurement is. In an example with two mirrors, a 1K x 2K pixel camera is preferred and a 2K x 2K pixel camera is preferred when four mirrors are used to achieve the same resolution. In general, for 1 ≦ n ≦ 2 and 1 ≦ m ≦ 2, an nK × mK pixel camera is preferred.
[52] Depending on the image quality required, it is also possible to use a camera with higher or lower resolution. The camera's resolution must be adapted to record all images simultaneously in any way.
[53] By employing a more sophisticated setup with a general camera and a dichroic mirror, the side view embodiment can also be implemented with a smaller pixel count camera by reusing wavelength multiplexing for the various views. Based on the methods described above, one skilled in the art of optics will have no difficulty in devising several possible setups.
[54] The determination of the position of the contact element is determined based on the image recorded in a similar manner as described in PCT / BE00 / 00020, incorporated herein by reference.

权利要求:
Claims (15)
[1" claim-type="Currently amended] A method for measuring the position of each of a set of N contact elements of an electronic component, the method comprising:
Bringing the set of contact elements into the measurement plane;
Illuminating said measuring plane with a first light source which is substantially homogeneous;
Forming a first light path in a first viewing angle direction generated by a first light beam calculated by the first light source and reflecting on at least one of the contact elements, wherein the first light path is the at least one; Starting at one contact element and ending at the image plane of the camera;
Forming a second light path produced by a second light beam obtained by reflection at at least one said contact element in a second viewing angle direction having a value different from said first viewing angle, said second Said optical path starting at said at least one contact element and ending at said image plane of said camera;
Forming a first image of the contact element by selectively opening the first light path and by the camera and by selectively opening the second light path and by the camera a second of the contact element Forming an image; And
Measuring the position using the first image and the second image.
[2" claim-type="Currently amended] The method of claim 1 wherein the second light beam is produced by a second light source.
[3" claim-type="Currently amended] The method of claim 2, wherein the first light source and the second light source produce light having a non-overlapping wavelength.
[4" claim-type="Currently amended] The method of claim 1, wherein the first light path and the second light path have substantially the same average optical length.
[5" claim-type="Currently amended] 5. The method of claim 1, wherein the first light source produces the first light beam with an angle of incidence up to 20 ° on the element. 6.
[6" claim-type="Currently amended] 6. The method of claim 1, wherein the first optical path has an initial section starting from the contact element and extending substantially perpendicular to the measurement plane. 7.
[7" claim-type="Currently amended] 7. The method of claim 1, wherein the first optical path has an initial section starting from the contact element and the second viewing angle α is in a range of 20 ° ≦ α ≦ 80 °. How to.
[8" claim-type="Currently amended] An apparatus for measuring the position of each of a set of N contact elements of an electronic component, the apparatus comprising:
A first light source provided for generating a substantially homogeneous light beam and for illuminating a measurement plane in which said contact element is disposed; First optical means and a camera provided for forming in a first viewing angle direction a first light path produced by the first light beam that is generated by the first light source and reflects at least one of the contact elements; Second optical means provided for forming a second light path generated by a second light beam obtained by reflection at at least one said contact element in a second viewing angle direction having a value different from said first viewing angle ; And selection means mounted to the first and second light paths and provided to selectively open one of the first or second light paths, the first light path starting at the at least one contact element and the camera. Terminating at an image plane of the second optical path starting at the at least one contact element, the camera being connected to processing means provided for measuring the position from an image recorded by the camera, and the second And the optical path terminates at the image plane of the camera.
[9" claim-type="Currently amended] 9. The device of claim 8, comprising a second light source provided for calculating a second light beam, the second light beam having its output second light beam incident on the measurement plane at an angle α, wherein α is 20 °. ≤ α ≤ 80 °.
[10" claim-type="Currently amended] 10. The apparatus of claim 9, wherein the first and second light sources calculate light in a wavelength range that does not overlap light.
[11" claim-type="Currently amended] 10. The apparatus of claim 9, wherein the means is provided for sequentially switching on and off the first and second light sources.
[12" claim-type="Currently amended] 12. An apparatus according to any one of claims 8 to 11, wherein said selecting means is formed by a dichroic mirror.
[13" claim-type="Currently amended] 12. An apparatus according to any one of claims 8 to 11, wherein said selecting means is formed by a semi-transparent mirror and a shutter.
[14" claim-type="Currently amended] An apparatus for measuring the position of each of a set of N contact elements of an electronic component, the apparatus comprising:
A first light source provided for illuminating the measurement plane in which the contact element is disposed; And a camera provided for recording a first image of the contact element obtained by reflection of light on the measurement plane; The first illumination source is provided for generating a substantially homogeneous light beam, at least one lateral mirror is set up at a viewing angle ψ adjacent the measuring plane, and the camera is driven by the at least one lateral mirror. And a resolution provided for recording the reflected light and for forming a second image therefrom and adapted to simultaneously form the first and second images.
[15" claim-type="Currently amended] 15. The apparatus of claim 14, wherein the camera has a resolution of nK x mK, wherein 1≤n≤2 and 1≤m≤2.

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同族专利:

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公开号 | 公开日

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US7423743B2|2008-09-09|

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KR100849653B1|2008-08-01|

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JP2004516491A|2004-06-03|

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HK1062106A1|2006-05-12|

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US20040085549A1|2004-05-06|

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CN1266994C|2006-07-26|

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WO2002054849A8|2003-12-24|

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EP1354505A1|2003-10-22|

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EP1354505B1|2005-06-29|

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DE60204849T2|2006-05-11|

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CN1502220A|2004-06-02|

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EP1220596A1|2002-07-03|

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DE60204849D1|2005-08-04|

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AT298973T|2005-07-15|

引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2000-12-29|Priority to EP00204761A

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2000-12-29|Priority to EP00204761.1

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2002-01-02|Application filed by 이코스비젼 시스팀스 엔.브이.

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2002-01-02|Priority to PCT/BE2002/000001

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2004-04-06|Publication of KR20040029316A

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2008-08-01|Application granted

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2008-08-01|Publication of KR100849653B1

优先权:

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申请号 | 申请日 | 专利标题

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EP00204761A|EP1220596A1|2000-12-29|2000-12-29|A method and an apparatus for measuring positions of contact elements of an electronic component|

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EP00204761.1|2000-12-29|

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PCT/BE2002/000001|WO2002054849A1|2000-12-29|2002-01-02|A method and an apparatus for measuring positions of contact elements of an electronic component|